5

Hot Filament CVD epitaxy of 3C-SiC on 6H and 3C-SiC substrates

Year:
2017
Language:
english
File:
PDF, 437 KB
english, 2017
8

Hot Filament CVD Growth of 4H-SiC Epitaxial Layers

Year:
2018
Language:
english
File:
PDF, 2.35 MB
english, 2018